薄膜型全固体電池、電子機器、および薄膜型全固体電池の製造方法

Title:

薄膜型全固体電池、電子機器、および薄膜型全固体電池の製造方法

Document Type and Number:

Japanese Patent JP7319114

Kind Code:

B2

Abstract:

To provide a novel thin-film all-solid-state battery using a semiconductor process, a semiconductor device including a thin-film all-solid-state battery, and a manufacturing method of the thin-film all-solid-state battery.SOLUTION: The thin-film all-solid-state battery includes a pair of electrodes, and a solid electrolyte sandwiched between the pair of electrodes, one of the pair of electrodes includes a silicon substrate having a groove, and the solid electrolyte uses a thin-film all-solid-state battery on the silicon substrate. A semiconductor process is used to process the groove of the silicon substrate.SELECTED DRAWING: Figure 1

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Inventors:

Takayasu Oka

Application Number:

JP2019127402A

Publication Date:

August 01, 2023

Filing Date:

July 09, 2019

Export Citation:

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Assignee:

ROHM Co., Ltd.

International Classes:

H01M4/134; H01M10/0585; H01M4/1395; H01M4/38; H01M4/66; H01M10/0562

Domestic Patent References:

JP2018139232A
JP2017103253A
JP2009123380A
JP2010015997A

Foreign References:

WO2019146512A1

Attorney, Agent or Firm:

Hidekazu Miyoshi
Keishin Terayama

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