Title:
THIN-FILM TYPE ELECTRON SOURCE AND MANUFACTURE THEREFOR AND THIN-FILM TYPE ELECTRON SOURCE APPLIED APPARATUS
Document Type and Number:
Japanese Patent JP3643503
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To avoid lowering in electron emitting efficiency and to improve yield by electrically separating respective upper electrodes each upper bus electrode by step difference parts of respective first insulating films which have step difference parts extended outside from the side surfaces of a first/second bus electrodes of respective upper bus electrodes.
SOLUTION: In a thin electron source matrix, an upper bus line is composed of a laminated film composed of a thin bus electrode lower layer 15 and a thick bus electrode upper layer 16, and an insulating layer 17 is formed on the bus electrode upper layer 16. Thus, an upper electrode film formed from above it is cut by a step difference structure formed of the insulating layer 17 and the bus electrode upper layer 16, to be worked as an upper electrode 13. Such constitution can obviate a photo processes for working the upper electrode, and an ashing process for cleaning the upper electrode surface, for inexpensively manufacturing a thin-film type electrons source having high electron emitting efficiency and a high yield.
Inventors:
Toshiaki Kusunoki
Mutsumi Suzuki
Masakazu Sagawa
Makoto Okai
Akitoshi Ishizaka
Mutsumi Suzuki
Masakazu Sagawa
Makoto Okai
Akitoshi Ishizaka
Application Number:
JP21152899A
Publication Date:
April 27, 2005
Filing Date:
July 27, 1999
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
H01J9/02; G09F9/30; H01J1/312; H01J29/04; H01J31/12; H01J37/06; H01J37/073; (IPC1-7): H01J1/312; G09F9/30; H01J9/02; H01J29/04; H01J31/12; H01J37/06
Domestic Patent References:
| JP11120898A | ||||
| JP7078553A | ||||
| JP2299124A |
Attorney, Agent or Firm:
Akita Haruki