Title:
THIN-FILM TYPE MAGNETIC INDUCTION ELEMENT
Document Type and Number:
Japanese Patent JP3114392
Kind Code:
B2
Abstract:
PURPOSE: To realize a thin-film type magnetic induction element whose performance is hardly affected by parasitic capacitance by providing a slit in a direction parallel to a direction wherein a conductor is extended inside a coil to a magnetic thin film.
CONSTITUTION: A magnetic induction element 20 is constituted by laminating a magnetic thin film 21, an insulation film 22, a thin-film conductor 23, an insulation film 24 and a magnetic thin film 25 on an upper side of an insulation film 11 covering a surface of a chip 10 of an integrated circuit device one by one. A cut-out portion of a peripheral edge of the magnetic thin film 21 is connected to the wiring film 12, inside the chip 10 at a position of a central window. Slits 21a and 25a are provided parallel to a direction wherein a conductor 23a of a coil is extended to the magnetic thin films 21 and 25. The slits are provided at a pitch of every other conductor 23a of a coil, and the mutual slit pitch is 0.5 to 2 times a characteristic length of a magnetic path of a magnetic thin film. Thereby, it is possible to solve a problem of parasitic capacitance which is a defect of a thin film type magnetic inductive element and to improve high frequency performance thereof.
Inventors:
Akira Saito
Application Number:
JP27638792A
Publication Date:
December 04, 2000
Filing Date:
October 15, 1992
Export Citation:
Assignee:
Fuji Electric Co., Ltd.
International Classes:
H01F17/00; (IPC1-7): H01F17/00
Domestic Patent References:
| JP3268410A | ||||
| JP3280509A |
Attorney, Agent or Firm:
Masaharu Shinobe