Title:
THIN FILM TYPE PHOTOELECTRIC CONVERTER AND MANUFACTURE THEREOF
Document Type and Number:
Japanese Patent JPS59194479
Kind Code:
A
Abstract:
PURPOSE:To obtain a thin film type photoelectric converter having excellent photoconductive sensitivity upon high resistance and emission of intrinsic absorption light in a thin oxidized zinc film accumulated on a substrate by setting the excessive zinc amount to oxygen to 20ppm or less. CONSTITUTION:One-valency metal element is contained in a thin oxidized zinc film accumulated on a substrate, so that the molar ratio to the oxidized zinc is 5% or less. The excess zinc amount to oxygen of the thin oxidized zinc film is 20ppm or less. The thin film has vertical and/or parallel orientation to the substrate at the C-axis of the crystal.
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Inventors:
KIRIHATA YOSHIHIRO
Application Number:
JP6840883A
Publication Date:
November 05, 1984
Filing Date:
April 20, 1983
Export Citation:
Assignee:
TOMOEGAWA PAPER CO LTD
International Classes:
H01L31/04; H01L31/18; (IPC1-7): H01L31/04
Domestic Patent References:
| JPS5363023A | 1978-06-06 |