Title:
THIN FILM TYPE RESISTOR, ITS MANUFACTURING, FLOW RATE SENSOR, HUMIDITY SENSOR, GAS SENSOR AND TEMPERATURE SENSOR
Document Type and Number:
Japanese Patent JP3457826
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To improve temperature characteristics of resistor(TCR), while reducing the dispersion of the TCR.
SOLUTION: A metal resistance film on a substrate 1 is formed of a platinum resistance film 6 having the crystal grain diameter set to at least 800&angst by a sputtering method. For the film forming condition, RF power in the range of 0.54W/cm2-2.7W/cm2 and the temperature of the substrate 1 in the range of 100°C-500°C are selectively combined. Thus, the dispersion of the TCR can be reduced while a TCR is heightened.
Inventors:
Hiroyoshi Shoji
Takayuki Yamaguchi
Junichi Azumi
Yukito Sato
Seisei Uenishi
Takayuki Yamaguchi
Junichi Azumi
Yukito Sato
Seisei Uenishi
Application Number:
JP1824397A
Publication Date:
October 20, 2003
Filing Date:
January 31, 1997
Export Citation:
Assignee:
株式会社リコー
リコーエレメックス株式会社
リコーエレメックス株式会社
International Classes:
B81B7/00; G01F1/68; G01P5/12; G01F1/692; G01J5/20; G01K7/18; G01N27/12; G01W1/11; H01C7/00; (IPC1-7): G01F1/692
Domestic Patent References:
| JP60170202A | ||||
| JP6140513A | ||||
| JP95284A |
Attorney, Agent or Firm:
Akira Kashiwagi (1 person outside)