Title:
THIN-FILM TYPE SENSOR
Document Type and Number:
Japanese Patent JP2001027571
Kind Code:
A
Abstract:
To provide a practical noise-resistance structure for a thin-film type sensor.
The thin-film type pressure sensor 1, equipped with a metallic diaphragm 4 which bends corresponding to pressure, stain gauges which are arranged on the top surface of the metallic diaphragm 4 across an insulating layer, and a detecting circuit composed of a bridge circuit including the stain gauges, is equipped with a metallic sensor housing 10 fitted with the metallic diaphragm 4 and an insulating bush 20, an insulating plate 21, and an O ring 24 as an insulator interposed between the sensor housing 10 and metallic diaphragm 4.
Inventors:
Mizuno, Naoki
Matsumae, Etsuko
Matsumae, Etsuko
Application Number:
JP1999000198628
Publication Date:
January 30, 2001
Filing Date:
July 13, 1999
Export Citation:
Assignee:
KAYABA IND CO LTD
International Classes:
G01L9/04; G01L19/14; G01L9/04; G01L19/00; (IPC1-7): G01L9/04; G01L19/14
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