PURPOSE: To provide a thin magnetic film having high saturation magnetic flux density, by specifying C content in a thin Fe-C film.
CONSTITUTION: A thin magnetic film has a composition consisting of C in an amount not exceeding 5.0at.% and the balance Fe. If necessary, at least one kind among Si, Ge, Al, Y, Ta, Pt, Ti, and Cr in the amount not exceeding 0.5wt.% is incorporated to the above Fe-C film. Since this thin magnetic film contains Fe as matrix, high saturation magnetic flux density is provided. Further, coercive force can be reduced by the addition of the prescribed amounts of C. When this thin magnetic film is laminated alternately with a nonmagnetic film of SiO2, etc., or another magnetic film of 'Permalloy(R)', etc., soft-magnetic properties are effectively improved. Moreover, it is preferable to form the Fe-C film by a dual ion beam sputtering method.
ISHIWATA NOBUYUKI
MATSUMOTO TAKAYUKI
