Title:
薄板収納システム、薄板処理システムおよび薄板収納方法
Document Type and Number:
Japanese Patent JP6685865
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To reduce damage of a thin-board when housing a plurality number of thin-boars into a cassette at high density.SOLUTION: A holding part holds a cassette. The cassette includes a plurality of first convex parts arrange along a first direction where a first end part in a second direction orthogonal to the first direction of a plurality of thin plates that is faced in the first direction and is arranged with an interval can be supported. The cassette includes a plurality of second convex parts arrange along the first direction where a second end part directed to the direction opposite to the second direction of each of the plurality of thin plates can be supported. A gas supply part supplies a gas between a gap of a Nth thin plate and a (N+1)th thin plate when the thin plate is inserted into between the first and second convex parts of a (N+1)th group of the cassette and the first and second convex parts of a (N+2)th group in a state where the first and second end parts are supported from the first thin plate to the (N+1)th thin plate from one pair of the first and second convex parts to a (N+1)th group of the first and second convex parts (N is a natural number) from an upper direction of the cassette.SELECTED DRAWING: Figure 1
Inventors:
Shinichi Miki
Naohiro Yonekura
Masafumi Tsubaki
Naohiro Yonekura
Masafumi Tsubaki
Application Number:
JP2016167331A
Publication Date:
April 22, 2020
Filing Date:
August 29, 2016
Export Citation:
Assignee:
Kyocera Corporation
International Classes:
H01L21/677; B65G25/04; B65G49/06
Domestic Patent References:
| JP8264619A | ||||
| JP2002198277A | ||||
| JP2013187493A | ||||
| JP2007142327A | ||||
| JP2305740A | ||||
| JP10242095A | ||||
| JP2002305231A |
Attorney, Agent or Firm:
Yoshitake Hidetoshi
Takahiro Arita
Takahiro Arita