Title:
THIN TYPE GLASS RETAINING DEVICE OF VACUUM BELLOWS TYPE AND CHEMICAL LIQUID COATING DEVICE USING THIN TYPE GLASS RETAINING DEVICE
Document Type and Number:
Japanese Patent JPH08229489
Kind Code:
A
Abstract:
PURPOSE: To form a thin film such as a uniform resist by utilizing a chemical coating device for an already known cathode ray tube or the like for a liquid crystal cathode tube panel without damaging a thin sheet such as a glass plate for a liquid crystal panel.
CONSTITUTION: A plurality of vacuum suction pads divided into two units and at least two vacuum bellows 6a and 6b providing vacuum to vacuum holders 5a and 5b forming vacuum chambers independently for respective units are arranged on the bottom of a container 1 with an enlarged rectangular opening and the pressure inside the vacuum bellows 6a and 6b is reduced to suck and retain a sheet.
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Inventors:
KANAZAWA TADASHI
WATANABE TOMIKATSU
WATANABE TOMIKATSU
Application Number:
JP3558395A
Publication Date:
September 10, 1996
Filing Date:
February 23, 1995
Export Citation:
Assignee:
HITACHI LTD
HITACHI DEVICE ENG
HITACHI DEVICE ENG
International Classes:
G02B5/20; B05C11/08; B05C11/11; B05D1/40; B05D3/00; B05D7/00; H01L21/027; (IPC1-7): B05C11/11; B05C11/08; B05D1/40; B05D3/00; B05D7/00; G02B1/10; G02B5/20; H01L21/027
Attorney, Agent or Firm:
Kenjiro Take