Title:
THIN ZIRCONIA DIAPHRAGM STRUCTURE, ITS MANUFACTURE, AND PIEZOELECTRIC/ELECTROSTRICTIVE FILM DEVICE USING THE SAME
Document Type and Number:
Japanese Patent JP3280799
Kind Code:
B2
Abstract:
PURPOSE: To prevent generation of recesses and cracks in sintered a zirconia diaphragm, by preparing a green zirconia sheet that contains specific substance.
CONSTITUTION: A zirconia substrate 4 contains alumina component and calcia component or magnecia component and/or silica component together with the alumina component and the calcina component whose total amount is 0.1-5.0wt.%. A diaphragm structure body 2 is integrally constituted of a zirconia substrate 4 as a retainer having a window part 6, and a thin zirconia diaphragm plate 8 which covers the window part 6. That is, the diaphragm structure body 2 is obtained as follows; after a zirconia green sheet giving the diaphragm plate 8 is stuck on a zirconia green substrate giving the zirconia substrate 4 so as to cover the window part, and an integrally unified laminate is obtained, it is wholly baked.
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Inventors:
Yukihisa Takeuchi
Tsutomu Nanataki
Hideo Masumori
Katsuyuki Takeuchi
Tsutomu Nanataki
Hideo Masumori
Katsuyuki Takeuchi
Application Number:
JP14832094A
Publication Date:
May 13, 2002
Filing Date:
June 29, 1994
Export Citation:
Assignee:
Nippon Insulator Co., Ltd.
International Classes:
C04B35/48; B32B18/00; C04B35/486; G01L7/08; H01H36/00; H01L41/08; H01L41/09; (IPC1-7): H01L41/08; C04B35/48; H01H36/00
Domestic Patent References:
| JP529675A | ||||
| JP5139827A | ||||
| JP53123410A |
Attorney, Agent or Firm:
Michio Nakajima (2 outside)