Title:
THREAD GROOVE MOLECULAR PUMP
Document Type and Number:
Japanese Patent JPH05164086
Kind Code:
A
Abstract:
PURPOSE: To reduce time required for working thread groove.
CONSTITUTION: A static cylinder of a thread groove molecular pump is constituted by an inner cylinder 2 and an outer cylinder 1, and a molten material such as plastic or metal is used for the inner cylinder 1 and a thread groove 5 is formed by molten forming on the inner wall of the inner cylinder 2. By this, optimum thread items can easily be obtained. Also, time for forming the thread groove 4 is drastically reduced.
Inventors:
UCHIDA RIICHI
KAMETANI HIROCHIKA
NAYA KOTARO
KAMETANI HIROCHIKA
NAYA KOTARO
Application Number:
JP33322391A
Publication Date:
June 29, 1993
Filing Date:
December 17, 1991
Export Citation:
Assignee:
HITACHI LTD
International Classes:
F04D19/04; F04D29/02; (IPC1-7): F04D19/04; F04D29/02
Attorney, Agent or Firm:
Yukihiko Takada