THREE-AXIS ACCELERATION SENSOR - MATSUSHITA ELECTRIC WORKS LTD

Title:

THREE-AXIS ACCELERATION SENSOR

Document Type and Number:

Japanese Patent JPH11242050

Kind Code:

A

Abstract:

To provide a three-axis acceleration sensor with improved sensitivity by narrowing the essential total width of a beam for constituting a flexible part.

A flexible part 2 is constituted of two parallel beams 21 and another beam 22 that is formed for connecting base parts at the side of a fixing part, and the width of the essential flexible part 2 is narrowed. A piezo resistor 23 or 24 for x or y axis is formed at the connection site with a connection part 3 of each beam 21, and a piezo resistor 25 for z axis is formed at another beam 22.

More Like This:

WO/2004/048912	DEVICE AND METHOD FOR MONITORING AND CONTROLLING A VEHICLE
JP2005337964	MOMENT DETECTOR, AND DETECTOR FOR DETECTING FORCE GENERATED IN TIRE
WO/1997/014969	METHOD AND APPARATUS FOR MEASURING ACCELERATION OR MECHANICAL FORCES

Inventors:

NAKAMURA TAKURO
YOSHIDA HITOSHI
ISHIDA TAKUO
TOMONARI SHIGEAKI
KAMAKURA MASATOMO
OKA NAOMASA

Application Number:

JP6060998A

Publication Date:

September 07, 1999

Filing Date:

February 24, 1998

Export Citation:

Click for automatic bibliography generation Help

Assignee:

MATSUSHITA ELECTRIC WORKS LTD

International Classes:

G01L5/16; G01P15/12; G01P15/18; (IPC1-7): G01P15/12; G01L5/16

Attorney, Agent or Firm:

Keisei Nishikawa (1 person outside)

Previous Patent: ACCELERATION DETECTION DEVICE AND LONG-TERM INSTALLATION TYPE EQUIPMENT INCORPORATING IT

Next Patent: CAPACITANCE TYPE MULTI-AXES ACCELERATION SENSOR