Title:
3次元基準マーク
Document Type and Number:
Japanese Patent JP5492364
Kind Code:
B2
Abstract:
A method and system for forming and using a fiducial (204) on a sample (200) to locate an area of interest (202) on the sample, the method comprising forming a fiducial by depositing a block of material on a sample proximal to an area of interest on the sample, the block of material extending from the surface of the sample to a detectable extent above the surface of the sample; and milling, using a charged particle beam, a predetermined pattern into at least two exposed faces of the block of material; subsequent to forming the fiducial, detecting the location of the area of interest by detecting the location of the fiducial; and subsequent to detecting the location of the area of interest, imaging or milling the area of interest with a charged particle beam.
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Inventors:
Cliff badge
Greg Clark
Todd Hanson
Scott Edward Fuller
Jason Donald
Greg Clark
Todd Hanson
Scott Edward Fuller
Jason Donald
Application Number:
JP2013121959A
Publication Date:
May 14, 2014
Filing Date:
June 10, 2013
Export Citation:
Assignee:
F-I-I Company
International Classes:
H01J37/305; B23K15/00; H01J37/28
Domestic Patent References:
| JP2012243726A |
Attorney, Agent or Firm:
Masahiko Amagai