To provide a three-dimensional shape measuring device capable of acquiring the whole shape data in a short time, while removing a dead angle generated on a measuring object.
This three-dimensional shape measuring device 1 is equipped with a holding means 2 capable of holding the measuring object 10 and rotating it around a rotation axis 2a, a laser beam source 9 for irradiating the measuring object 10 with a laser beam, a laser floodlight system 3 equipped with a scanning means 11 for changing the irradiation direction of the laser beam at a fixed angle around a laser optical axis 9b of the laser beam, and a light receiving system 4 including a light receiving element 13 for receiving reflected light reflected by the measuring object 10. In the device 1, the rotation axis 2a of the holding means 2, the laser optical axis 9b of the laser floodlight system 3, and a center axis 12a of the light receiving system 4 are arranged on the same plane.
|JP2006300539||THREE0-DIMENSIONAL MEASUREMENT APPARATUS AND SUBSTRATE INSPECTION APPARATUS|
|JP06109451||ESTIMATION OF THREE-DIMENSIONAL POSTURE|