Title:
スルーホール形成方法
Document Type and Number:
Japanese Patent JP4031171
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a piezoelectric vibrator manufactured by using a forming method of a through-hole having an excellent through shape. SOLUTION: Protective films 24 are formed on an upper surface and a lower surface of a lid body forming substrate 22, openings are provided in a recessed part 13 forming part and a through-hole 22a forming part, a resist film 25 for blast is formed at a through-hole 22a forming side and an opening is provided in the through-hole 22a forming part, a blast processing is executed and a preliminary hole 32 is opened. Thereafter, the resist film 25 for blast is removed, chemical etching is executed to form the recessed part 13 and the through-hole 22a.
Inventors:
Matsuyama Masaru
Application Number:
JP2000038437A
Publication Date:
January 09, 2008
Filing Date:
February 16, 2000
Export Citation:
Assignee:
Seiko Instruments Inc.
International Classes:
C03C15/00; H01L21/306; H01L41/22; H01L41/23; H01L41/313; H01L41/332; H01L41/337; H03H3/02; H03H9/02
Domestic Patent References:
| JP54032068A | ||||
| JP3236234A | ||||
| JP8316763A | ||||
| JP9102720A |
Foreign References:
| WO1998027020A1 |
Attorney, Agent or Firm:
Yoshiharu Matsushita