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Patent Searching and Data


Title:
THROUGH-HOLE INSPECTION DEVICE
Document Type and Number:
Japanese Patent JPH04316343
Kind Code:
A
Abstract:

PURPOSE: To provide for a through-hole inspection device where a defect of the through-hole including a plating thickness failure of a metal layer which is formed by plating can be detected positively without being affected by a material of an insulation film regarding the through-hole inspection device, especially a device for detecting a defect of a metal layer which is formed by plating within a through-hole which is formed at an insulation film of a printed-wiring board.

CONSTITUTION: A title item consists of a ring-shaped light-emitting means 1 for emitting a ring-shaped light to a side wall of a through-hole 53 which is formed at an insulation film 52, an image pick-up means 2 for picking up an image of a ring-shaped lighting rays 57 which are formed at a side wall of the through-hole 53 by ring-shaped light which is emitted by this ring-shaped light-emitting means 1, and a through-hole judging means 33 for calculating an amount of displacement from a roundness of the ring-shaped lighting rays 57 which are picked up by this image pick-up means 2 and then judging that a defect exists at the through-hole 53 when the amount of displacement exceeds a prescribed value.


Inventors:
OKA KOJI
NISHIYAMA YOJI
ANDO MORITOSHI
Application Number:
JP8371491A
Publication Date:
November 06, 1992
Filing Date:
April 16, 1991
Export Citation:
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Assignee:
FUJITSU LTD
International Classes:
G01B11/24; H01L21/66; H01S3/00; (IPC1-7): G01B11/24; H01L21/66; H01S3/00
Attorney, Agent or Firm:
Seiichi Samukawa