TiO2 PHOTOCATALYST MEMBRANE, AND ITS PRODUCTION METHOD AND METHOD FOR CONTROLLING CRYSTAL STRUCTURE OF THE PHOTOCATALYST MEMBRANE

Title:

TiO2 PHOTOCATALYST MEMBRANE, AND ITS PRODUCTION METHOD AND METHOD FOR CONTROLLING CRYSTAL STRUCTURE OF THE PHOTOCATALYST MEMBRANE

Document Type and Number:

Japanese Patent JP2004033994

Kind Code:

A

Abstract:

To provide a TiO2 membrane excellent in a photocatalytic property, its production method and a method for controlling the crystal structure of the membrane.

The TiO2 membrane primarily of a rutile structure is used. In this membrane, Ti and TiO are used as a volatile material, when the TiO2 membrane is formed on a substrate by an electron beam (EB) process. The membrane is formed at a rate of 10 nm/s or more and obtained by controlling the crystal structure of the membrane to be produced.

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Inventors:

TAKAGI KENICHI
KURAUCHI TOSHIHARU

Application Number:

JP2002198372A

Publication Date:

February 05, 2004

Filing Date:

July 08, 2002

Export Citation:

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Assignee:

JAPAN SCIENCE & TECH CORP
ULVAC CORP
MITSUHIKO KK

International Classes:

B01J21/06; B01J37/02; C23C14/08; C23C14/24; B01J35/02; (IPC1-7): B01J35/02; B01J21/06; B01J37/02; C23C14/08; C23C14/24

Attorney, Agent or Firm:

Kiyoshi Higashida
Masaaki Yamashita
Launch Yoji

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