Title:
集積されたマイクロメカニカル音叉共振器を備えるタイムベース
Document Type and Number:
Japanese Patent JP4099393
Kind Code:
B2
Abstract:
There is described a time base comprising a resonator (4) and an integrated electronic circuit (3) for driving the resonator into oscillation and for producing, in response to this oscillation, a signal having a determined frequency. The resonator is an integrated micromechanical tuning fork resonator (4) supported above a substrate (2) and adapted to oscillate in a plane substantially parallel to the substrate. The tuning fork resonator comprises a base member (5) extending substantially perpendicularly from the substrate, a free-standing oscillating structure (6) connected to the base member and including at least a first pair of substantially parallel fork tines (7, 8) and an electrode structure (9) disposed adjacent to the fork tines and connected to the integrated electronic circuit.
Inventors:
Diosouf, Metin
Kuck, Heinz
Plats, liner
Kuck, Heinz
Plats, liner
Application Number:
JP2002552188A
Publication Date:
June 11, 2008
Filing Date:
November 13, 2001
Export Citation:
Assignee:
Outer S.A. Manufacture Orologer Switzerland
International Classes:
B81B3/00; H03H9/24; G10K15/00; H03B5/30; H03H9/21
Domestic Patent References:
| JP2001512645A | ||||
| JP55021679A | ||||
| JP52039391A | ||||
| JP2000317899A |
Foreign References:
| WO2001033711A1 |
Attorney, Agent or Firm:
Masaki Yamakawa