Title:
レーザ加工のための微細スケールでの時間的制御
Document Type and Number:
Japanese Patent JP6785858
Kind Code:
B2
Abstract:
The present application relates to a method and an apparatus. The method includes directing a laser beam (404) to a target (410) along a scan path at a variable scan velocity and adjusting a digital modulation during movement of the laser beam (404) along the scan path and in relation to the variable scan velocity so as to provide a fluence at the target (410) within a predetermined fluence range along the scan path. the method can further include the step of adjusting a width of the laser beam (404) with a zoom beam expander (418). The apparatus (400) include a laser source (402) situated to emit a laser beam (404), a 3D scanner (408) situated to receive the laser beam (404) and to direct the laser beam (404) along a scan path in a scanning plane at the target (410), and a laser source digital modulator coupled to the laser source (402) so as to produce a fluence at the scanning plane along the scan path that is in a predetermined fluence range as the laser beam scan speed changes along the scan path.
Inventors:
Martin Sen, Robert Jay
One, Chi
One, Chi
Application Number:
JP2018527718A
Publication Date:
November 18, 2020
Filing Date:
November 21, 2016
Export Citation:
Assignee:
N Lite, Inc.
International Classes:
B23K26/00; B22F3/105; B22F3/16; B23K26/073; B23K26/082; B23K26/21; B23K26/34; G02B26/10; H01S3/00; H01S3/102
Domestic Patent References:
| JP2006045584A | ||||
| JP2012059920A | ||||
| JP2003129862A | ||||
| JP2009142866A | ||||
| JP2012528011A | ||||
| JP6297168A | ||||
| JP2009248157A |
Foreign References:
| WO2008053915A1 |
Attorney, Agent or Firm:
Osamu Yamamoto
Toru Miyamae
Motoharu Nakanishi
Ryota Suematsu
Toru Miyamae
Motoharu Nakanishi
Ryota Suematsu
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