Title:
酸化錫膜とその製造方法および酸化錫膜の製造装置
Document Type and Number:
Japanese Patent JP4304391
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a tin oxide film small in sheet resistance, high in transmittance, moreover high in hazing rate diffused light quantity/whole transmitted light quantity and uniformly having fine ruggedness on the surface. SOLUTION: In a method for forming a tin oxide film in which tin tetrachloride is brought into reaction with water, a tin oxide film is formed on a glass substrate moving in one direction by a cold pressure CVD method, as to the atmosphere in the case gas contg. tin tetrachloride and water is discharged to the surface of the glass substrate, and the tin oxide film is formed, the concn. of water on the upstream side in the moving direction of the glass substrate is higher than that on the downstream side.
Inventors:
Kazuo Sato
Naoki Taneda
Makoto Fukawa
Toru Ikeda
Naoki Taneda
Makoto Fukawa
Toru Ikeda
Application Number:
JP23108299A
Publication Date:
July 29, 2009
Filing Date:
August 18, 1999
Export Citation:
Assignee:
Asahi Glass Co., Ltd.
International Classes:
C23C16/40; H01L31/04; C01G19/02; C03C17/245; G06F3/041
Domestic Patent References:
| JP7003463A | ||||
| JP2175631A |
Attorney, Agent or Firm:
Nozomi Watanabe
Haruko Sanwa
Haruko Sanwa