Title:
TIN OXIDE TERNARY FUNCTION THIN FILM AND ITS PRODUCTION
Document Type and Number:
Japanese Patent JP3271906
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a tin oxide functional tin film having excellent selectively orienting property, transparency and electroconductivity and useful as a transparent electrode and a crystal substrate, etc.
SOLUTION: A tin oxide film (TO) selectively oriented in (200) face is formed on a glass substrate from an organic solvent solution of dibutyltin diacetate by a spray heat-decomposition method, and a tin oxide film containing an element having the number of outermost shell electrons one more than that of tin or oxygen such as antimony or fluorine (ATO or FTO) is formed on the tin oxide film by a spray heat-decomposition of a solution obtained by adding the element having the number of outermost shell electrons one more than that of tin or oxygen such as antimony or fluorine to an organic solvent solution. Thus, the objective tin oxide thin film having enhanced selectively orienting property of (200) face of the (ATO or FTO) on a tin oxide film (TO) selectively oriented in (200) face, and also having excellent electroconductivity and transparency, is obtained.
Inventors:
Masaharu Kaneko
Kenji Murakami
Kenji Murakami
Application Number:
JP22583096A
Publication Date:
April 08, 2002
Filing Date:
August 07, 1996
Export Citation:
Assignee:
Japan Science and Technology Agency
International Classes:
C01G19/00; B01J19/00; C01G19/02; H01B5/14; H01B13/00; (IPC1-7): C01G19/02; B01J19/00; H01B5/14; H01B13/00
Domestic Patent References:
| JP7330336A | ||||
| JP283238A | ||||
| JP5418496A | ||||
| JP62267476A | ||||
| JP881779A |
Attorney, Agent or Firm:
Wataru Ogura