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Title:
TIP HOLDER
Document Type and Number:
Japanese Patent JP2014008710
Kind Code:
A
Abstract:

To provide a tip holder having functions appropriate to automatic exchange by a robot.

A tip holder 12 includes: a trunk portion 12a to be attached to a scribing head 10 of a substrate processing apparatus A; a pair of flat surfaces 12b provided at one end of the trunk portion 12a in parallel with the shaft center of the trunk portion 12a; a notched groove 12c provided between the flat surfaces 12b and 12b in parallel with the flat surfaces 12b; and a wheel tip 12e attached to the notched groove 12c. The tip holder 12 further includes at least one pin 12j, at the lower end of at least one of the pair of flat surfaces 12b, protruding from the flat surface 12b.


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Inventors:
TAKAMATSU IKUYOSHI
MIURA YOSHITAKA
TOMINAGA KEISUKE
Application Number:
JP2012147967A
Publication Date:
January 20, 2014
Filing Date:
June 29, 2012
Export Citation:
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Assignee:
MITSUBOSHI DIAMOND IND CO LTD
International Classes:
B28D5/02; B28D5/00; C03B33/027
Domestic Patent References:
JP2007152936A2007-06-21
Foreign References:
US4098156A1978-07-04
US20060162172A12006-07-27
EP1136455A12001-09-26
Attorney, Agent or Firm:
Yoshio Kashima



 
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