Title:
化学気相成長用のチタン錯体とそれを用いたPZT薄膜の製造方法
Document Type and Number:
Japanese Patent JP4120321
Kind Code:
B2
Inventors:
Hideko Kadokura
Yukie Okuhara
Yukie Okuhara
Application Number:
JP2002255843A
Publication Date:
July 16, 2008
Filing Date:
July 29, 2002
Export Citation:
Assignee:
High purity chemical research institute
International Classes:
C07C49/92; C07F7/28; C23C16/18; H01L21/316
Domestic Patent References:
| JP2001234343A | ||||
| JP2001151782A | ||||
| JP2002212128A | ||||
| JP2003300925A | ||||
| JP2003324100A | ||||
| JP2002212130A | ||||
| JP2003213417A | ||||
| JP2003321475A |
Other References:
明星大学理工学部研究紀要,2001, No.37, p.35-39