【発明の名称】精密表面処理のための研磨材およびその製造方法

Title:

【発明の名称】精密表面処理のための研磨材およびその製造方法

Document Type and Number:

Japanese Patent JPH09505529

Kind Code:

A

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Inventors:

Serifanov, Oleg Hradimirovich
Tochitosky, Eddard Ivanovich
Achrich, Valery Hradimirovich

Application Number:

JP51494195A

Publication Date:

June 03, 1997

Filing Date:

November 21, 1994

Export Citation:

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Assignee:

Plasmoteg Engineering Center
Tego Scientific and Engineering Center of Physics and Technology of Thin Films

International Classes:

B24D11/00; B24D3/00; B24D3/02; B24D3/06; B24D3/28; B24D11/06; C01B31/06; C09K3/14; C23C14/00; C23C14/06; C23C14/20; C23C14/24; C23C14/32; C30B29/04; C23C14/02; (IPC1-7): B24D3/00; B24D3/00; C01B31/06; C09K3/14; C23C14/24; C30B29/04

Attorney, Agent or Firm:

Takashi Ishida (3 others)

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