Title:
【発明の名称】改良型極高真空測定装置
Document Type and Number:
Japanese Patent JPS6020693
Kind Code:
B2
Inventors:
KANEMOCHI TOORU
NAGATA SABURO
NAGATA SABURO
Application Number:
JP10654379A
Publication Date:
May 23, 1985
Filing Date:
August 21, 1979
Export Citation:
Assignee:
NAGATA SABURO
International Classes:
G01L21/32; (IPC1-7): G01L21/32
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