【発明の名称】関節アーム形搬送装置

Title:

【発明の名称】関節アーム形搬送装置

Document Type and Number:

Japanese Patent JPH02500179

Kind Code:

A

Abstract:

In a material transfer device, an articulated arm assembly extends and retracts in a "froglike" motion to transfer an object between a plurality of locations. The articulated arm assembly is rotatable about a pivot point in a radial plane and can be raised or lowered in an axial direction to align the object with the intended destination. A greater degree of axial mobility may be provided, for example by a rotating lift screw. A vacuum chamber may be provided, with the arm assembly moving the object between locations in the chamber.

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Inventors:

Hardigan brian
Todd Yee, Buttomley
Davis, Jr., James Sea

Application Number:

JP50458788A

Publication Date:

January 25, 1990

Filing Date:

May 17, 1988

Export Citation:

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Assignee:

Burtx Automation Ink.

International Classes:

B25J9/10; B25J9/00; B25J15/06; B25J21/00; H01L21/677; (IPC1-7): B25J9/00

Domestic Patent References:

JPS60183736A	1985-09-19
JPS61203281A	1986-09-09
JPS6042281B2	1985-09-21
JPS5080765A	1975-07-01
JPS6090684A	1985-05-21

Attorney, Agent or Firm:

Kiyoshi Takahashi (1 person outside)

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