Title:
【発明の名称】自動外観検査装置
Document Type and Number:
Japanese Patent JP3198105
Kind Code:
B2
Inventors:
Yuzo Taniguchi
Yoshikazu Hori
Yoshikazu Hori
Application Number:
JP22717290A
Publication Date:
August 13, 2001
Filing Date:
August 29, 1990
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
G01N21/88; G01N21/956; H01L21/66; (IPC1-7): H01L21/66; G01N21/88
Domestic Patent References:
| JP1296142A | ||||
| JP6358138A | ||||
| JP63126242A |
Attorney, Agent or Firm:
Yamato Tsutsui