Title:
【発明の名称】基台装着式容量型圧力センサ
Document Type and Number:
Japanese Patent JP3410095
Kind Code:
B2
Abstract:
A pedestal mount capacitive pressure sensor (10) is supported in a housing (11) and used to sense fluid pressures to provide air pressure data relating to the performance of air vehicles. The capacitive sensor uses a thick base plate (40) on which a diaphragm (48) is mounted. A capacitive electrode (52) is mounted to the diaphragm and pressure deflects the diaphragm to provide an output. The pressure sensor (10) is mounted in an outer housing (11) using a stress isolating pedestal (20).
Inventors:
Will Cox, Charles Earl.
Levy, Kevin Earl.
Petersen, Eric P.
Patersen, Larry A.
Levy, Kevin Earl.
Petersen, Eric P.
Patersen, Larry A.
Application Number:
JP50733694A
Publication Date:
May 26, 2003
Filing Date:
August 27, 1993
Export Citation:
Assignee:
Rosemount Incorporated
International Classes:
G01L9/12; G01L9/00; G01L13/00; (IPC1-7): G01L13/00
Domestic Patent References:
| JP6412238A | ||||
| JP5946830A | ||||
| JP6048136U | ||||
| JP1503001A | ||||
| JP1503002A |
Attorney, Agent or Firm:
Kazuki Tanaka (2 outside)