Title:
【発明の名称】ブリツジ筒環組立装置
Document Type and Number:
Japanese Patent JPS5927306
Kind Code:
B2
Inventors:
SUGIURA YOSHIAKI
HATAKEYAMA TSUTOMU
NISHIDA TADASHI
HATAKEYAMA TSUTOMU
NISHIDA TADASHI
Application Number:
JP4113479A
Publication Date:
July 04, 1984
Filing Date:
April 06, 1979
Export Citation:
Assignee:
TOYOTA MOTOR CO LTD
International Classes:
F16B4/00; B21D39/00; B23P19/02; (IPC1-7): B23P19/02; B21D39/00; F16B4/00
Attorney, Agent or Firm:
Tomita Koharu
Previous Patent: An atomic-layer-deposition reactor which processes a substrate group, and a method for the same
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