PURPOSE: To produce a monodisperse copolymer comprising two kinds of structural units and meeting the requirements of a polymer for a resist material by subjecting two specific monomers to anionic copolymn.
CONSTITUTION: This monodisperse copolymer comprising structural units of formulas II and IV is obtd. by subjecting monomers of formulas I and II to anionic copolymn. In the anionic copolymn., a known living anionic polymn. initiator, esp. an organometallic compd.(e.g. n-butyllithium), is pref. used to improve the monodisperseness, The copolymn. is pref. carried out in an org. solvent (e.g. tetrahydrofuran) to facilitate the control of reaction rate. The obtd. copolymer meets the requirements of a polymer for a high-resolution resist material.
YAMADA MOTOYUKI
ISONO HISANOBU
