Title:
【発明の名称】クリーンルーム用建屋構造
Document Type and Number:
Japanese Patent JP3336516
Kind Code:
B2
Inventors:
Muneharu Fukuda
Noboru Nakajima
Akira Azegami
Fumi Sato
Kazuhiro Shimono
Hiroshi Yamamoto
Noboru Nakajima
Akira Azegami
Fumi Sato
Kazuhiro Shimono
Hiroshi Yamamoto
Application Number:
JP10528495A
Publication Date:
October 21, 2002
Filing Date:
April 28, 1995
Export Citation:
Assignee:
Hitachi Plant Construction Co., Ltd.
ROHM Co., Ltd.
ROHM Co., Ltd.
International Classes:
E04H5/02; E04B1/98; E04H9/02; F24F3/16; F24F7/06; (IPC1-7): E04H9/02; E04B1/98; E04H5/02; F24F3/16; F24F7/06
Domestic Patent References:
| JP4146377A | ||||
| JP782918A |
Attorney, Agent or Firm:
Kenzo Matsuura