Title:
【発明の名称】静電容量式圧力検出器
Document Type and Number:
Japanese Patent JP2570420
Kind Code:
B2
Abstract:
A pressure detector for measuring the pressure of a pressurized fluid by means of electrostatic capacitance comprising a diaphragm displaceable in response to the pressure, and a pair of fixed electrodes, one of each of the fixed electrodes being located on each side of the diaphragm and being electrostatically capacitively coupled to the diaphragm, each of the fixed electrodes being shaped to essentially eliminate electrostatic capacitances that are not differentially linear with respect to the pressure.
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Inventors:
Tamai Mitsuru
Takahama Sadazo
Kimihiro Nakamura
Toshiyuki Takano
Mikihiko Matsuda
Takahama Sadazo
Kimihiro Nakamura
Toshiyuki Takano
Mikihiko Matsuda
Application Number:
JP9109289A
Publication Date:
January 08, 1997
Filing Date:
April 11, 1989
Export Citation:
Assignee:
Fuji Electric Co., Ltd.
International Classes:
G01L9/00; G01L9/12; G01L13/06; (IPC1-7): G01L13/06; G01L9/12
Domestic Patent References:
| JP6444823A | ||||
| JP5783440U |
Attorney, Agent or Firm:
Iwao Yamaguchi