Title:
【発明の名称】静電容量式圧力センサ
Document Type and Number:
Japanese Patent JP2517467
Kind Code:
B2
Abstract:
In a capacitive pressure sensor and a method of manufacturing the same, first and second grooves are formed in one and the other surfaces of a substrate, respectively. A first sacrificial layer is embedded in the first groove. First insulating films are formed on the substrate in which the first sacrificial layer is formed. The first insulating films have a first film electrode stacked therebetween. A second sacrificial layer having a predetermined shape is stacked on the first insulating film. Second insulating films are formed on the first insulating film on which the second sacrificial layer is formed. The second insulating films have a second film electrode stacked therebetween. A pressure introducing hole is formed in the second groove formed in the other surface of the substrate to reach the first sacrificial layer. First and second hollow portions are formed by removing the first and second sacrificial layers.
Inventors:
FUKIURA TAKESHI
KIMURA SHIGEO
ISHIKURA YOSHUKI
NISHIMOTO IKUO
KIMURA SHIGEO
ISHIKURA YOSHUKI
NISHIMOTO IKUO
Application Number:
JP26668990A
Publication Date:
July 24, 1996
Filing Date:
October 05, 1990
Export Citation:
Assignee:
YAMATAKE HONEYWELL CO LTD
International Classes:
G01L9/00; G01L13/06; G01L9/12; (IPC1-7): G01L13/06; G01L9/12
Domestic Patent References:
| JP6184537A | ||||
| JP60138977A | ||||
| JP5957131A | ||||
| JP57186140A | ||||
| JP629247A | ||||
| JP63298130A | ||||
| JP130423U |
Attorney, Agent or Firm:
Masaki Yamakawa (3 outside)