Title:
【発明の名称】荷電粒子線装置
Document Type and Number:
Japanese Patent JP2746573
Kind Code:
B2
Inventors:
OOTAKA TADASHI
ICHIHASHI MIKIO
ICHIHASHI MIKIO
Application Number:
JP14754597A
Publication Date:
May 06, 1998
Filing Date:
June 05, 1997
Export Citation:
Assignee:
HITACHI SEISAKUSHO KK
International Classes:
H01J37/073; H01J37/16; H01J37/18; H01J41/12; (IPC1-7): H01J37/18; H01J37/073; H01J37/16; H01J41/12
Domestic Patent References:
| JP55161327A | ||||
| JP59169045A | ||||
| JP4817964A | ||||
| JP622152U | ||||
| JP61168549U |
Attorney, Agent or Firm:
Akio Takahashi