Title:
【発明の名称】薬液処理装置および薬液処理方法
Document Type and Number:
Japanese Patent JP2982747
Kind Code:
B2
Inventors:
HASE USHIO
Application Number:
JP16752597A
Publication Date:
November 29, 1999
Filing Date:
June 24, 1997
Export Citation:
Assignee:
NIPPON DENKI KK
International Classes:
G03F7/30; B01D53/22; B01D53/58; G03F7/42; H01L21/027; H01L21/304; H01L21/306; (IPC1-7): H01L21/304; B01D53/22; G03F7/30; G03F7/42; H01L21/306
Domestic Patent References:
| JP590240A | ||||
| JP7108233A |
Attorney, Agent or Firm:
Wakabayashi Tadashi