Title:
【発明の名称】クリーン・ドラフト装置
Document Type and Number:
Japanese Patent JP2852662
Kind Code:
B2
Inventors:
YAMADA AKIO
SUGAO KAZUTOMO
SUGAO KAZUTOMO
Application Number:
JP14585789A
Publication Date:
February 03, 1999
Filing Date:
June 07, 1989
Export Citation:
Assignee:
DAN SANGYO KK
International Classes:
F24F7/06; B01L1/00; F24F9/00; H01L21/02; (IPC1-7): B01L1/00; F24F7/06; F24F9/00; H01L21/02
Domestic Patent References:
| JP63248449A | ||||
| JP62183803A | ||||
| JP5539212A | ||||
| JP2277556A | ||||
| JP5121299A | ||||
| JP2112331U |
Attorney, Agent or Firm:
Naotaka Ide