Title:
【発明の名称】クリーンルームとその構築方法
Document Type and Number:
Japanese Patent JP2003508659
Kind Code:
A
Abstract:
A clean room which uses a perforated floor upon which equipment can be directly placed is presented. The perforated floor includes a regular array of openings through which air can pass to an underlying facility room. The openings are covered by a grate through which the air can pass. In combination the perforated floor and the grates are able to support equipment in any location thereon.
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Inventors:
Joseph Lapisalda
Timothy Korey
Timothy Korey
Application Number:
JP2001521847A
Publication Date:
March 04, 2003
Filing Date:
August 07, 2000
Export Citation:
Assignee:
Speedfam-I.I.C. Corporation
International Classes:
E04B5/43; E04B5/48; E04B9/02; E04F15/02; E04F15/024; E04H5/02; F24F3/16; F24F7/06; F24F7/10; (IPC1-7): E04H5/02; E04B5/43; E04B9/02; E04F15/02; F24F7/06
Attorney, Agent or Firm:
Ryota Sano (1 outside)