【発明の名称】クリーニングガス

Title:

【発明の名称】クリーニングガス

Document Type and Number:

Japanese Patent JP3014368

Kind Code:

B2

Inventors:

Isamu Mohri
Tetsuya Tamura
Mitsuya Ohashi

Application Number:

JP23933898A

Publication Date:

February 28, 2000

Filing Date:

August 26, 1998

Export Citation:

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Assignee:

Central Glass Co., Ltd.

International Classes:

C11D7/02; C09K13/08; C11D7/38; C11D17/00; C23C14/00; C23C16/44; C23F4/00; H01L21/205; H01L21/302; H01L21/304; H01L21/3065; (IPC1-7): C09K13/08; C23C14/00; C23C16/44; C23F4/00; H01L21/205; H01L21/304

Domestic Patent References:

JP10317146A

Attorney, Agent or Firm:

Yoshiyuki Nishi

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