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Patent Searching and Data


Title:
MANUFACTURE OF PHOTODETECTOR
Document Type and Number:
Japanese Patent JPH0832097
Kind Code:
A
Abstract:

PURPOSE: To obtain a photodetector with a suppressed reduction in its high-frequency response characteristics due to the generation of carriers in the outside peripheral region of a P-I-N junction due to light incidence.

CONSTITUTION: A heavily doped N-type InP layer 101, a lightly doped InGaAs layer 102 and a lightly doped InP layer 103 are epitaxially grown in order on an InP substate 100. Then, a ring-shaped insulating film mask 104 is formed and a havily doped P-type layer 105 is selectively formed in the layer 103. Then, a resist mask 106 us formed in such a way as to cover an inside opening part formed in the mask 104. After that, the layers 103 and 102 are etched using the masks 104 and 106 to form a photodetecting part use mesa 107.


Inventors:
MITANI KATSUHIKO
ITO KAZUHIRO
Application Number:
JP15838194A
Publication Date:
February 02, 1996
Filing Date:
July 11, 1994
Export Citation:
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Assignee:
HITACHI LTD
International Classes:
H01L31/10; (IPC1-7): H01L31/10
Attorney, Agent or Firm:
Ogawa Katsuo