Title:
【発明の名称】複合型赤外線検出器
Document Type and Number:
Japanese Patent JP3136649
Kind Code:
B2
Abstract:
PURPOSE:To provide a composite infrared ray detector which can effectively compensate a radiation thermocouple type infrared ray detecting part and a pyroelectric type infrared ray detecting part each other without cancelling characteristics of both the parts. CONSTITUTION:A warm junction 37 of a pyroelectric type infrared ray detecting part 40 and a radiation thermocouple type infrared ray detecting part is provided on a thin film formed of a single layer of a membrane (10mum or less in thickness) made of SiO2. On the other hand, a cold junction 39 of the radiation thermocouple type infrared ray detecting part is mounted on a support member 33 (200-300mum in thickness) made of Si single crystal set on the periphery of the membrane 31, and the junction 37 and the pyroelectric type infrared ray detecting part are covered with an infrared ray absorber 51 to form a composite infrared ray detector.
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Inventors:
Yoshihiro Konaka
Yasuhiro Negoro
Yasuhiro Negoro
Application Number:
JP13666091A
Publication Date:
February 19, 2001
Filing Date:
June 07, 1991
Export Citation:
Assignee:
MURATA MANUFACTURING CO.,LTD.
International Classes:
G01J1/02; G01J5/02; G01J5/12; G01J5/34; H01L37/02; (IPC1-7): H01L37/02; G01J1/02; G01J5/02
Domestic Patent References:
| JP57104828A |
Attorney, Agent or Firm:
Kenji Yoshida (2 outside)
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