Title:
【発明の名称】複合真空ポンプ
Document Type and Number:
Japanese Patent JP2627437
Kind Code:
B2
Inventors:
Tatsuharu Ikegami
Tetsuro Obayashi
Keiichi Yoshida
Shoji Iguchi
Tetsuro Obayashi
Keiichi Yoshida
Shoji Iguchi
Application Number:
JP22653388A
Publication Date:
July 09, 1997
Filing Date:
September 12, 1988
Export Citation:
Assignee:
Osaka Vacuum Equipment Co., Ltd.
International Classes:
F04D19/04; (IPC1-7): F04D19/04
Domestic Patent References:
| JP5759098A | ||||
| JP6385290A |
Attorney, Agent or Firm:
Teruaki Koyama