Title:
【発明の名称】複合プラズマ配置、複合プラズマ配置の発生方法及び発生装置
Document Type and Number:
Japanese Patent JPH11512820
Kind Code:
A
Abstract:
A compound plasma configuration can be formed from a device having pins, and an annular electrode surrounding the pins. A cylindrical conductor is electrically connected to, and coaxial with, the annular electrode, and a helical conductor coaxial with the cylindrical conductor. The helical conductor is composed of wires, each wire electrically connected to each pin. The annular electrode and the pins are disposed in the same direction away from the interior of the conducting cylinder.
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Inventors:
Korok, Paul M.
Application Number:
JP51365597A
Publication Date:
November 02, 1999
Filing Date:
September 24, 1996
Export Citation:
Assignee:
Korok, Paul M.
International Classes:
H05H1/02; H05H1/04; G21B1/11; H05H1/24; H05H1/54; (IPC1-7): G21B1/00; H05H1/02
Attorney, Agent or Firm:
Hidekazu Miyoshi (1 outside)