Title:
【発明の名称】集光装置
Document Type and Number:
Japanese Patent JP3024147
Kind Code:
B2
Abstract:
PURPOSE:To enhance condensing efficiency by disposing a 1st plane formed by the focus of a 1st spherical mirror and a 2nd plane formed by the focus of a 2nd spherical mirror so that they may be orthogonally crossed with each other. CONSTITUTION:Outputted light from a light source 1 is reflected on two spherical mirrors 4 and 8, and condensed at the position of a slit 9. And then, optical elements which are constituted of the light source 1 and the two spherical mirrors 4 and 8 are disposed so that the 1st plane formed by the master axis of the 1st spherical mirror of the light source 1 and the focus of the 1st spherical mirror 4, and the 2nd plane formed by the focus of the 1st spherical mirror 4 and the master axis of the 2nd spherical mirror 8 and the focus of the 2nd spherical mirror 8 may be orthogonally crossed with each other. In this case, the positional relationship among the light source 1, the spherical mirros 4 and 8 and the slit 9 (a focus C2), and the radius of curvature of the spherical mirrors 4 and 8 are selected so as to obtain delta1 = delta2. Thus, the outputted light from the light source 1 is condensed at the position of the slit 9 (the focus C2).
Inventors:
Tamizo Matsuura
Application Number:
JP25261089A
Publication Date:
March 21, 2000
Filing Date:
September 28, 1989
Export Citation:
Assignee:
Yokogawa Electric Corporation
International Classes:
G01J3/10; G01J1/04; G02B17/00; G02B17/08; G02B19/00; (IPC1-7): G02B17/08; G02B19/00
Domestic Patent References:
| JP62164010A | ||||
| JP6193424A |