Title:
BONDING DEVICE AND JIG USED AND OPERATING REFERENCE POSITION SETTING METHOD OF MOBILE BODY
Document Type and Number:
Japanese Patent JPH077036
Kind Code:
A
Abstract:
PURPOSE: To make it possible to divert operation control data of a mobile body provided in each bonding device between a plurality of bonding devices without revising the data.
CONSTITUTION: An operation reference position of mobile bodies 157, 158 and 120a having bonding devices is defined as a second reference position while an axis running through an approximately central point 104 of a bonding stage is set as a first reference position. Distance data about the first and second reference position is stored in a memory means, which makes is possible to divert operation control data of the mobile body of each device without any modification by an operator.
Inventors:
TORIGOE SOUZOU
Application Number:
JP16748993A
Publication Date:
January 10, 1995
Filing Date:
June 14, 1993
Export Citation:
Assignee:
KAIJO KK
International Classes:
H01L21/60; H01L21/50; (IPC1-7): H01L21/60
Attorney, Agent or Firm:
Shoji Hagiri
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