Title:
【発明の名称】半導体素子検査用コンタクタ
Document Type and Number:
Japanese Patent JP2583252
Kind Code:
B2
Inventors:
FUJISHITA TOSHIHIRO
Application Number:
JP30182987A
Publication Date:
February 19, 1997
Filing Date:
November 30, 1987
Export Citation:
Assignee:
KYUSHU NIPPON ELECTRIC
International Classes:
G01R31/26; H01L21/66; (IPC1-7): G01R31/26; H01L21/66
Domestic Patent References:
| JP6244280U |
Attorney, Agent or Firm:
Masanori Fujimaki