Title:
TARGET FOR HIGH FREQUENCY SPUTTERING
Document Type and Number:
Japanese Patent JPS6021862
Kind Code:
A
Inventors:
HATA TAKUOKI
IGUCHI TAKASHI
IGUCHI TAKASHI
Application Number:
JP13123783A
Publication Date:
February 04, 1985
Filing Date:
July 18, 1983
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
C04B35/453; C04B35/48; C23C14/34; H01L41/18; (IPC1-7): C04B35/48; C23C14/34; H01L41/18
Attorney, Agent or Firm:
Toshio Nakao