Title:
【発明の名称】ヒータレール用カバー
Document Type and Number:
Japanese Patent JP3316515
Kind Code:
B2
Inventors:
Seiichi Takasu
Application Number:
JP14892998A
Publication Date:
August 19, 2002
Filing Date:
May 29, 1998
Export Citation:
Assignee:
NEC Machinery Co., Ltd.
International Classes:
F24F9/00; B23K31/02; H01L21/50; H01L21/52; (IPC1-7): H01L21/52
Domestic Patent References:
| JP4326528A | ||||
| JP5548938A |
Attorney, Agent or Firm:
Shogo Ehara