Title:
BURNING-IN CHAMBER FOR MAKING HEAT MEDIUM OF HEATING BLOCK
Document Type and Number:
Japanese Patent JPH0783996
Kind Code:
A
Abstract:
PURPOSE: To improve measurement efficiency and precision, and provide an inexpensive small sized device by bringing a heating block with temperature detectors into contact with DUT and increase its temperature.
CONSTITUTION: A burning-in board 1 mounts a lot of DUT 1A. The burning-in board 1 is housed in a burning-in chamber 2 and a burning-in test is conducted. Temperature detectors 3A are disposed in a heating block in the form of coming into contact with the surface of DUT 1A. The heating block is brought into contact with DUT 1A and increase its temperature.
Inventors:
ATSUMI HIDEAKI
Application Number:
JP18689993A
Publication Date:
March 31, 1995
Filing Date:
June 30, 1993
Export Citation:
Assignee:
ANDO ELECTRIC
International Classes:
G01R31/28; H01L21/326; H01L21/66; G01R31/26; (IPC1-7): G01R31/26; G01R31/28; H01L21/326; H01L21/66
Next Patent: 磁気反発パンチ・ヘッド装置