Title:
【発明の名称】真空度測定装置
Document Type and Number:
Japanese Patent JPS5919299
Kind Code:
B2
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Inventors:
SENTODA OSAMU
Application Number:
JP15691976A
Publication Date:
May 04, 1984
Filing Date:
December 25, 1976
Export Citation:
Assignee:
TOKYO SHIBAURA ELECTRIC CO
International Classes:
G01L21/30; G01L21/00; G01M3/40; (IPC1-7): G01L21/00
Attorney, Agent or Firm:
Takehiko Suzue
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