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Title:
METHOD AND APPARATUS FOR REMOVING STATIC ELECTRICITY
Document Type and Number:
Japanese Patent JPH0722530
Kind Code:
A
Abstract:

PURPOSE: To effectually remove static electricity by keeping an extremely clean atmosphere.

CONSTITUTION: Air is sent from a blower 8 into an air duct 2 to migrate gas. The gas is irradiated with ultraviolet radiation from a light source 4 disposed in the air duct 2. A gas molecule is decomposed into constituent atoms by ultraviolet radiation energy higher than interatomic binding energy to produce ions. With the ions so produced static electricity is neutralized for removal thereof.


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Inventors:
NISHIZAWA JUNICHI
Application Number:
JP2448893A
Publication Date:
January 24, 1995
Filing Date:
February 12, 1993
Export Citation:
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Assignee:
SEMICONDUCTOR RES FOUND
International Classes:
H01L21/304; H01L21/02; H01L21/027; H01L23/00; H05F3/04; (IPC1-7): H01L23/00; H01L21/304; H05F3/04
Domestic Patent References:
JPH03205855A1991-09-09
JPS5912600A1984-01-23
Attorney, Agent or Firm:
Kazuyuki Hirayama (1 person outside)



 
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